High speed Topology Scan Units - multi beam These multi-beam high speed Topology Scan units offer world-leading high scan speeds due to data sampling rates of up to 380 kHz measurement and are particularly well suited for the fast TopoGetter TM -series systems. As with the single-beam Topology Scan Units surfaces with 3-dimensional structures can be measured at very high resolutions down to topological structures of only nanometers. Other multi-beam high speed Topology Scan units key performance features include: Scan resolution in x/y-direction up to *) 2,000 lines/cm ( approx. 5,000 dpi) Up to 2 µm position accuracy of scan head Measuring quantization of 32,768 steps in vertical (z)-direction in 16 bit data format Choice of optics for measuring ranges is 1 to 10 mm Ultra high scan speeds due to multi beam simultaneous sampling. Automatic layer scan option for objects of various heights Maximum measuring range in multiple layers: 50 mm Maximum high of scan objects 120 mm *)  Because of constraints due to the image file format TIFF,    the highest scan resolution may only be available for a smaller than the maximum scan area.
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